Method of calibrating a lithographic apparatus and device...

Details Method of calibrating a lithographic apparatus and device... Method of calibrating a lithographic apparatus and device...

2008-09-16

2008-09-16

Rutledge, Della J. (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S072000, C355S077000, C378S034000

Reexamination Certificate

active

11223209

ABSTRACT:
In calibration of overlay performance of an immersion lithographic apparatus, two sets of overlay data are obtained from exposures carried out using normal and reversed meanders. The two data sets can then be used to eliminate effects due to wafer cooling.

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European Search Report for EP Appl. No. 06254621.3-1226 issued Dec. 19, 2006.

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