Data processing: measuring – calibrating – or testing – Measurement system in a specific environment – Chemical analysis
Reexamination Certificate
2008-07-30
2011-11-22
Tsai, Carol (Department: 2857)
Data processing: measuring, calibrating, or testing
Measurement system in a specific environment
Chemical analysis
C702S022000, C250S310000, C250S307000, C250S390070, C378S044000, C378S045000, C378S046000, C378S048000, C378S050000, C378S083000, C378S113000, C378S124000
Reexamination Certificate
active
08065094
ABSTRACT:
A method is provided of calculating the structure of an inhomogeneous sample in which an electron beam is used to cause excitation of x-rays from the sample under known conditions of beam energy and geometry with respect to the sample. Notably the beam current is unknown. Measured x-ray intensity data for the sample corresponding to one or more sets of beam conditions and beam currents are firstly obtained, together with comparative x-ray intensity data for samples having known structures. A beam current factor for each beam condition is estimated and effective x-ray intensity data for each of the sets of conditions are then calculated using the measured and comparative x-ray intensity data and the beam current factor. The structure of the sample is then calculated for each of the sets of conditions using the effective x-ray intensity data. Predicting x-ray intensity data are produced corresponding to the calculated structure and compared with the effective x-ray intensity data. These steps are repeated using revised beam current factors until the predicted and effective x-ray intensity data achieve a predetermined similarity condition.
REFERENCES:
patent: 4260885 (1981-04-01), Albert
patent: 5299138 (1994-03-01), Fiori et al.
patent: 6118850 (2000-09-01), Mayo et al.
patent: 6349128 (2002-02-01), Nelson
patent: 6675106 (2004-01-01), Keenan et al.
patent: 7016462 (2006-03-01), Keville et al.
patent: 7132652 (2006-11-01), Testoni
patent: 7166838 (2007-01-01), Janik
patent: 2002/0097834 (2002-07-01), Satoh
patent: 2004/0099805 (2004-05-01), Ochiai et al.
patent: 2006/0049349 (2006-03-01), Shemesh
patent: 2007/0092060 (2007-04-01), Grodzins
patent: WO2007/132243 (2007-11-01), None
Raynald Gauvin, “Quantitative X-Ray Microanalysis of Heterogeneous Materials Using Monte Carlo Simulations”, Microchim Acta 155, May 4, 2006, pp. 75-81, Springer-Verlag 2006.
Peter Duncumb, Ian R. Barkshire, Peter J. Statham, “Improved X-ray Spectrum Simulation for Electron Microprobe Analysis”, Microscopy and Microanalysis, 7, pp. 341-355, 2001.
Jean-Louis Pouchou, “X-Ray Microanalysis of Stratified Specimens”, Analytica Chimica Acta, 283, pp. 81-97, 1993.
Peter J. Statham, “Deconvolution and Background Subtraction by Least-Squares Fitting with Prefiltering of Spectra”, Analytical Chemistry, vol. 49, No. 14, pp. 2149-2154, Dec. 1977.
Jean-Louis Pouchou, “X-Ray Microanalysis of Thin Surface Films and Coatings”, Mik rochimica Acta 138, pp. 133-152, Springer-Verlag 2002.
Numerical Recipes In C: The Art of Scientific Computing, Chapter 15, “Modeling of Data” 1992, pp. 656-706, Numerical Recipes Software; Second Edition, W.H. Press et al., Cambridge University Press 1999.
Blank Rome LLP
Oxford Instruments Nonotechnology Tools Unlimited
Tsai Carol
LandOfFree
Method of calculating the structure of an inhomogeneous sample does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method of calculating the structure of an inhomogeneous sample, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of calculating the structure of an inhomogeneous sample will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4310230