Method of burning in a semiconductor device

Electric heating – Heating devices – Combined with diverse-type art device

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324 731, 324158R, G01R 3100

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active

052947769

ABSTRACT:
Since the power-supply and/or signal-transmission wiring layers connected to the semiconductor chip regions are formed, each individual integrated circuit can be burned in on the semiconductor wafer and, in other words, an integrated circuit can be burned in on a wafer level. The integrated circuit can thus be burned in at the end of a wafer process. An assembled semiconductor device is subjected to a high temperature or a high humidity, for checking the reliability of the assembled device.

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patent: 5059899 (1991-10-01), Farnworth et al.
patent: 5070296 (1991-12-01), Pricke
IBM Tech. Disclosure Bulletin, vol. 35, No. 6, Nov. 1992 "Chip Burn-In Accomplished at the Wafer Level".
IBM Tech. Disclosure Bulletin, vol. 25, No. 7B, Dec. 1982, "Self-Heating Test Chip for Reliability Life Test".
IBM Tech. Disclosure Bulletin, vol. 14, No. 6, Nov. 1971, "Self-Contained Chip Heater".

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