Method of building a defect database

Details Method of building a defect database Method of building a defect database

2006-03-28

2006-03-28

Picard, Leo (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C707S793000

Reexamination Certificate

active

07020536

ABSTRACT:
First, a wafer with a plurality of defects generated in a first semiconductor process is provided. A defect inspection is performed to detect the defects on the wafer. Then, an automatic defect classification is performed according to a predetermined defect database having a defect classification recipe generated from a second semiconductor process. After that, a verifying process is further performed by comparing the result of the automatic defect classification with that of a manual defect classification to verify the accuracy of the automatic defect classification.

REFERENCES:
patent: 6512842 (2003-01-01), Steffan et al.
patent: 6643006 (2003-11-01), Hsu et al.
patent: 6826298 (2004-11-01), O'Dell et al.

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