Method of blasting process

Abrading – Abrading process – Utilizing fluent abradant

Reexamination Certificate

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Details

C134S007000

Reexamination Certificate

active

11678711

ABSTRACT:
Disclosed is a blast processing method for removing a deposit adhered onto a surface of a ceramic heater formed of aluminum nitride by blowing a blasting material onto the surface. Abrasive grains made of silicon carbide or aluminum oxide and having a grain size of #400 to #800 are used as the blasting material, and a blast pressure as a pressure when the blasting material collides with the surface of the ceramic heater is set at 40 to 150 gf/cm2.

REFERENCES:
patent: 2002/0168867 (2002-11-01), Haerle et al.
patent: 2003/0162483 (2003-08-01), Saka et al.
patent: 2002-028599 (2002-01-01), None
patent: 2005-193308 (2005-07-01), None

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