Cleaning and liquid contact with solids – Processes – Combined
Patent
1994-03-16
1996-02-20
Lacey, David L.
Cleaning and liquid contact with solids
Processes
Combined
134 32, 134 42, B08B 704
Patent
active
054925690
ABSTRACT:
When vapor-depositing a magnetic material 6 onto a base 3 in a vacuum vapor deposition tank 1, to clean the residue of evaporated atoms evaporated from the magnetic material 6 adhering undesirably to members 9, 10 constituting the vacuum vapor deposition tank 1, the members 9, 10 are separated and transported to a cleaning position after the completion of the process of vapor deposition onto the base 3, and the members 9, 10 are cleaned by a cleaning robot 21 arranged to be capable of controlling the cleaning direction, water pressure, and the like at the cleaning position. The members 9, 10 are then allowed to wait at the standby position in preparation for an ensuing vapor deposition process, and cleaning water is accommodated in a tank to ensure reutilization.
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Fuji Photo Film Co. , Ltd.
Lacey David L.
Vincent Sean
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