Coating apparatus – Gas or vapor deposition
Patent
1978-10-25
1981-04-21
Kendall, Ralph S.
Coating apparatus
Gas or vapor deposition
118729, 427 51, 427 86, 427 87, 427 91, 427109, 427255, 427331, 4272481, C23C 1308
Patent
active
042626307
ABSTRACT:
A method of applying a layer of a source substance over a recipient, consisting in that the substance of the source is converted to gas and then precipitated onto the surface of the recipient, wherein the substance is, according to the invention, applied over at least one intermediate body and then the substance is transferred from the intermediate body onto the recipient.
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Bochkarev Ellin P.
Korobov Oleg E.
Maslov Vadim N.
Nikitina Irina B.
Voronin Nikolai G.
Bell Janyce A.
Kendall Ralph S.
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