Method of applying a monolayer lubricant to micromachines

Details Method of applying a monolayer lubricant to micromachines Method of applying a monolayer lubricant to micromachines

1993-06-18

1995-04-04

Lusignan, Michael

Stock material or miscellaneous articles

Composite

Of silicon containing

156643, 156647, 310309, 427309, 427352, 427354, 427387, 427435, 428450, B31B 904

Patent

active

054036658

ABSTRACT:
A micromachine is lubricated in a fluid-based process. The known fluid-based process of releasing a sacrificial layer from a micromachine is followed by a fluid-based hydrophilic processing of the micromachine surfaces. A lubricating monolayer surface is then formed on the resultant hydrophilic micromachine surfaces. Afterwards, the surfaces are dried through conventional means.

REFERENCES:
patent: 4740410 (1988-04-01), Muller et al.
patent: 4943750 (1990-07-01), Howe et al.
patent: 5252881 (1993-10-01), Muller et al.
DePalma, Vito et al, "Friction and Wear of Self-Assembly Trichlorosilane Monolayer Films on Silicon", Eastman Kodak Company, Mar. 1, 1989.

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