Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate
2008-05-06
2008-05-06
Toatley, Jr., Gregory J. (Department: 2877)
Optics: measuring and testing
Inspection of flaws or impurities
Surface condition
C356S237300
Reexamination Certificate
active
11086442
ABSTRACT:
An apparatus for inspecting a pattern to detect a small pattern defect has an illuminating light source, as illuminating optical system having a plurality of illuminating portions for switching an optical path of illuminating light flux to a surface of board constituting the inspected object from a plurality of directions different from each other, a detecting optical system having a variable magnification using an object lens for condensing reflected diffracted light from the illuminated board, a focusing optical system having a variable magnification capable of focusing an optical image by converged reflected diffracted light with a desired focusing magnification and an optical detector for detecting the optical image focused by the focusing optical system to convert it into an image signal, an A/D converter for converting the image signal into a digital image signal, and an image signal processor for processing the digital image signal to detect the defect.
REFERENCES:
patent: 6310689 (2001-10-01), Ishikawa et al.
patent: 6411377 (2002-06-01), Noguchi et al.
patent: 6654111 (2003-11-01), Isozaki et al.
patent: 6657714 (2003-12-01), Almogy et al.
patent: 6778267 (2004-08-01), Drake
patent: 7046353 (2006-05-01), Isozaki et al.
patent: 62-089336 (1987-04-01), None
patent: 63-135848 (1988-06-01), None
patent: 01-117024 (1989-05-01), None
patent: 08-271437 (1996-10-01), None
patent: 2000-105203 (2000-04-01), None
patent: 2001-060607 (2001-03-01), None
Hamamatsu Akira
Hatano Hisashi
Jingu Takahiro
Mohara Yukihisa
Nakano Hiroyuki
Antonelli, Terry Stout & Kraus, LLP.
Hitachi High-Technologies Corporation
Toatley , Jr. Gregory J.
Ton Tri
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