Method of and system for sub-atmospheric gas delivery with backf

Details Method of and system for sub-atmospheric gas delivery with backf Method of and system for sub-atmospheric gas delivery with backf

1999-05-07

2000-12-05

Michalsky, Gerald A.

Fluid handling

Line condition change responsive valves

Safety cut-off requiring reset

137486, 1374875, G05D 706

Patent

active

061552895

ABSTRACT:
A sub-atmospheric gas delivery system (100) with a backflow control apparatus (10) for preventing backflow into the sub-atmospheric gas source (14). The gas delivery system includes three fluidly coupled sticks: a purge stick (120), a process gas delivery stick (124) and an evacuation stick (130). The backflow control apparatus comprises a gas line (26) fluidly coupling the sub-atmospheric gas source to a chamber (50), a valve (20) attached to the sub-atmospheric gas source for blocking fluid communication between the gas source and the gas line upon receipt of a first signal, a flow restrictor (R) in fluid communication with the gas line and positioned between the valve and the chamber, and first and second pressure transducers (P1 and P2) in fluid communication with the gas line and positioned on either side of the flow restrictor. Each transducer is capable of generating a signal representative of pressure. The backflow control apparatus further includes a valve controller unit (40) connected to the first and second pressure transducers and the valve. The controller is capable of generating the aforementioned first signal in response to the signals from the first and second pressure transducers.

REFERENCES:
patent: 5152309 (1992-10-01), Twerdochlib et al.
patent: 5158534 (1992-10-01), Berry et al.
patent: 5190068 (1993-03-01), Philbin
patent: 5441070 (1995-08-01), Thompson
patent: 5441076 (1995-08-01), Moriya et al.
patent: 5771178 (1998-06-01), Stemporzewski, Jr. et al.
patent: 5791369 (1998-08-01), Nishino et al.

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