Hazardous or toxic waste destruction or containment – Containment – Solidification – vitrification – or cementation
Patent
1995-03-02
1996-10-29
Gorgos, Kathryn
Hazardous or toxic waste destruction or containment
Containment
Solidification, vitrification, or cementation
588212, 427490, 20415715, A62D 300
Patent
active
055698107
ABSTRACT:
System for and a method of fixing chlorofluorocarbons or other halogenated hydrocarbons, for example, CHF.sub.3 or CCl.sub.2 F.sub.2 recirculated and collected or discharged from a dry etching apparatus, so as to make the chlorofluorocarbon or halogenated hydrocarbon harmless against the earth's ozone layer. A gaseous hydrocarbon like ethane, ethylene or acetylene gas is mixed with a chlorofluorocarbon or other halogenated hydrocarbon gas in a reaction tube 61. The mixed gas is then excited to a plasma state for plasma copolymerization. A solid copolymer of the halogenated hydrocarbon and the hydrocarbon generated by the plasma copolymerization is deposited and accumulated onto the inner wall of the reaction tube 61 or on a fixation member 14.
REFERENCES:
patent: 4312575 (1982-01-01), Peyman et al.
patent: 4366208 (1982-12-01), Akai et al.
patent: 4636435 (1987-01-01), Yanagihara et al.
patent: 4729906 (1988-03-01), Kleeberg et al.
patent: 5089290 (1992-12-01), Kleeberg et al.
Delacroix-Muirheid C.
Gorgos Kathryn
Samco International, Inc.
LandOfFree
Method of and system for processing halogenated hydrocarbons does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method of and system for processing halogenated hydrocarbons, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of and system for processing halogenated hydrocarbons will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1786832