Boots – shoes – and leggings
Patent
1995-01-27
1996-08-13
Teska, Kevin J.
Boots, shoes, and leggings
250396R, H01J 3700
Patent
active
055463193
ABSTRACT:
To improve in the throughput of an exposure system, the setting time during a step change in the output of an amplifier is reduced by switching resistance between the amplifier and a deflector, a glitch waveform generated during a step change in the output or a D/A converter at the preceding stage of the amplifier, is anticipated and is canceled out with a correction waveform, after the output of the D/A converter has settled, this output is sample held and the step change is interpolated at a smoothing circuit, the deflection area is increased by positioning a electrostatic deflector offset around the optical axis relative to another electrostatic deflector, the response speed of the main deflection is improved by adding auxiliary deflection coils of one or two turn, and the alignment time is reduced by combining the coordinate conversion in the wafer area and in the chip area. In order to correct the astigmatism of the electromagnetic lens, two stages or coils are provided and an electric current corresponding to the quantity of deflection is supplied to the coils.
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Abe Tomohiko
Arai Soichiro
Kai Jun-ichi
Kiuchi Takashi
Miyazawa Kenichi
Frejd Russell W.
Fujitsu Limited
Teska Kevin J.
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