Coating processes – Measuring – testing – or indicating – Thickness or uniformity of thickness determined
Patent
1982-08-25
1984-09-04
Morgenstern, Norman
Coating processes
Measuring, testing, or indicating
Thickness or uniformity of thickness determined
356281, 356282, 356 4, 427 8, G05D 503, G05F 166, B05D 100
Patent
active
044697139
ABSTRACT:
An arrangement for measuring and controlling the thickness of optically transparent coatings during their build-up on substrates in vacuum coating installations. The measurement is carried out by determining at least one reference value and at least one measured value for the transmission or reflection value of the coated object by using a measuring light beam, a monochromator, a photo-receiver, an amplifier and an analyzing circuit.
REFERENCES:
patent: 3773548 (1973-11-01), Baker et al.
patent: 4024291 (1977-05-01), Wilmanns
patent: 4068016 (1978-01-01), Wilmanns
Schwiecker Horst
Zoller Alfons
Fogiel Max
Leybold-Heraeus GmbH
Morgenstern Norman
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