Method of and device for sub-micron processing a surface

Static information storage and retrieval – Radiant energy – Semiconductive

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365151, 365118, 250306, 369101, G11C 1134, G11C 1300, G01N 2300, G01N 23225

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active

050383221

ABSTRACT:
A method of and a device for sub-micron deforming a surface (15) is described, for example for the purpose of inscribing information. During scanning of the surface the tip (14) of a scanning tunneling microscrope is held at a constant distance from the surface by means of a negative feedback control loop (18) which is controlled by a tunneling current (It) between the tip and the surface, and for forming a pit (21) in the surface (15). The control loop is deactivated and a tip height drive member (8) is energized by means a control voltage (Vpz) whose amplitude increases as a function of time and which has a predetermined final value, such that the tip is lowered into the material.

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J. Vac. Sci. Tech nol. A 6(2) Mar./Apr. 1988 "Surface Modification in the Nanometer Range by the Scanning Tunneling Microscope", by Staufer et al.
IBM J. Res. Develop. vol. 30, No. 5 Sept. 1986 "Surface Modification With the Scanning Tunneling Microscope" by Abraham et al.

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