Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent
1986-06-30
1987-12-22
Newsome, John H.
Coating processes
Electrical product produced
Integrated circuit, printed circuit, or circuit board
65 312, 118719, 118723, 427 451, 427163, B05D 306
Patent
active
047145897
ABSTRACT:
The inside of a tube of an electrically insulating material is coated with a layer of electrically insulating material by reactive deposition of the coating material from a gas mixture which is passed through the tube. The tube is heated and the deposition is activated by a plasma produced by microwaves. The plasma reciprocates in the tube. Energy consumption is reduced by heating the tube to the reaction temperature at least partly by the energy supplied by the plasma to the tube wall. Thermal losses of the tube are reflected back to the tube wall by a heat reflecting element.
REFERENCES:
patent: 3484276 (1969-12-01), Burggraaf et al.
patent: 4145456 (1979-03-01), Kuppers et al.
patent: 4145458 (1979-03-01), Koenings et al.
patent: 4417911 (1983-11-01), Cundy et al.
patent: 4493721 (1985-01-01), Auwerda et al.
patent: 4608070 (1986-08-01), Roba
Geittner, P., et al., "Low-Loss Optical Fibers Prepared by Plasma-Activated Chemical Vapor Deposition (CVD)", Appl. Phys. Lett., vol. 28, No. 11, pp. 645-646, (Jun. 1, 1976).
Kuppers, D., et al., "Preparation of Optical Waveguides with the Aid of Plasma-Activated Chemical Vapor Deposition at Low Pressures", Topics in Current Chemistry, vol. 89, pp. 107-131, (1980).
Auwerda Cornelis P.
Geittner Peter E. E.
Lydtin Hans-Jurgen
Newsome John H.
Schechter Marc D.
U.S. Philips Corporation
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