Method of and articles for accurately determining relative posit

Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

324716, 430 30, G01R 3100, G01R 2700, G03C 506

Patent

active

053732324

ABSTRACT:
A prepatterned potentiometer precursor includes a precursor substrate; and at least two spaced apart potentiometer precursor patterns on the substrate, each potentiometer precursor pattern including a bridge, two substantially similar end taps transverse to and extending from the bridge, and a center tap transverse to and extending from the bridge and centrally disposed between the end taps wherein the center taps of the bridges are substantially parallel to each other and are substantially wider than the end taps. A method of determining the distance between test features of test patterns on a test piece includes preparing a precursor substrate including at least two electrically conducting spaced apart potentiometer precursor patterns, each potentiometer precursor pattern including a bridge, two substantially similar end taps transverse to and extending from the bridge, and a center tap transverse to and extending from the bridge and centrally disposed between the end taps.

REFERENCES:
patent: 3650020 (1972-03-01), Mar
patent: 4347479 (1982-08-01), Cullet
patent: 4386459 (1983-06-01), Boulin
patent: 4399205 (1983-08-01), Bergendahl
Teague, "The National Institute of Standards and Technology Molecular Meaing Machine Project; Metrology and Precision Engineering Design", Journal of Vacuum Science Technology, vol.-B7, No. 6, 1989, pp. 1989-1902.
Cresswell et al, "A Modified Sliding Wire Potentiometer Test Structure For Mapping Nanometer-Level Distances", IEEE 1991 Conference on Microelectronic Test Structures, vol. 4, No. 1, 1991, pp. 129-134.
Allen et al, "Elimination Of Effects Due To Patterning Imperfections In Electrical Test Structures For Submicrometer Feature Metrology", Solid-State Electronics, vol. 35, No. 3, 1992, pp. 435-442.
Allen et al, "Voltage-Dividing Potentiometer Enhancements For High-Precision Feature Placement Metrology", IEEE 1992 International Conference on Microelectronic Test Structures, vol. 5, pp. 174-179.
Allen et al, "A New Test Structure For The Electrical Measurement Of The Width Of Short Features With Arbitrarily Wide Voltage Taps", IEEE Electron Device Letters, vol. 12, No. 6, 1992, pp. 322-324.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Method of and articles for accurately determining relative posit does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of and articles for accurately determining relative posit, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of and articles for accurately determining relative posit will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-1195498

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.