Method of and apparatus for transferring circular object

Details Method of and apparatus for transferring circular object Method of and apparatus for transferring circular object

1996-04-24

1998-01-13

Bidwell, James R.

Conveyors: power-driven

Conveyor system for moving a specific load as a separate unit

System includes control means responsive to sensing means

414217, B65G 2900

Patent

active

057069301

ABSTRACT:
When a carrier arm is retracted, a semiconductor wafer carried thereon passes between three light-emitting elements and three light-detecting elements associated therewith. At this time, a controller determines six points on the outer circumferential edge of the semiconductor wafer based on signals from sensors made up of the light-emitting elements and the light-detecting elements. The controller selects three of the determined points, determines the center of a circumscribed circle passing through the selected three points, and regards the determined center as the center of the semiconductor wafer. Then, the controller controls movement of the semiconductor wafer toward a rotary-cup coating device, an evacuating drying device, or an edge cleaning device based on the center of the semiconductor wafer.

REFERENCES:
patent: 4836733 (1989-06-01), Hertel et al.
patent: 5139132 (1992-08-01), Licht
patent: 5405230 (1995-04-01), Ono et al.
patent: 5486080 (1996-01-01), Siesadzki
patent: 5641264 (1997-06-01), Kuno et al.

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