Method of and apparatus for testing semiconductor device for ele

Details Method of and apparatus for testing semiconductor device for ele Method of and apparatus for testing semiconductor device for ele

1987-04-24

1989-04-18

Eisenzopf, Reinhard J.

Electricity: measuring and testing

A material property using electrostatic phenomenon

For flaw detection

324452, 324158R, 361225, G01N 2760, G01R 3126

Patent

active

048230880

ABSTRACT:
A method of testing the susceptibility of a semiconductor device having a dielectric package to withstand electrostatic charges charged on the dielectric package, comprising the steps of: connecting a switch in between input/output terminals of the semiconductor device and a reference potential source, applying a prescribed potential to the surface of the dielectric package to charge the surface with electric charges while the switch is in an open state, applying a prescribed potential to a terminal of the semiconductor device via a resistor, and discharging the charges to the reference potential source by closing the switch.

REFERENCES:
patent: 4636724 (1987-01-01), Fukuda et al.

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