Method of and apparatus for stress detection

Measuring and testing – Specimen stress or strain – or testing by stress or strain... – Specified electrical sensor or system

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G01B 716

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active

056591390

ABSTRACT:
A stress is detected by the utilization of a semiconductor equipped with a beam oscillator which is driven to generate a compound oscillation comprising a plurality of component oscillations with different component frequencies through the steps of detecting separately component amplitudes of the compound oscillation for the respective component frequencies, standardizing power spectra of the component amplitudes with theoretically obtained reference power spectra respectively, and determining a stress generated in the beam oscillator based on a mean stress value of stress values for the standardized power spectra from relations between power spectrum and stress value previously provided for the respective component amplitudes.

REFERENCES:
patent: 4062229 (1977-12-01), Godfrey et al.
patent: 4813271 (1989-03-01), Greenwood
patent: 5561248 (1996-10-01), Negoro

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