Method of and apparatus for purifying a solvent

Details Method of and apparatus for purifying a solvent Method of and apparatus for purifying a solvent

1996-03-22

1999-07-20

Yoon, Tae

Distillation: processes, separatory

With disparate physical separation

Utilizing removing solid from liquid

203 40, 203 44, B01D 314, B01D 500

Patent

active

059252243

ABSTRACT:
A solvent containing low-boiling and high-boiling impurities in an evaporating section, so that the high-boiling impurities is left as a tank bottom waste, and a solvent vapor from the section is guide through a mist separator into a condenser. A condensate produced in the condenser is returned to the mist separator so as to serve as a mist catching liquid. A fraction not having condensed in the condenser is fed to a rectifying section where fractional condensation is performed so that the low-boiling impurities are condensed to be removed. A remainder of the solvent vapor from which the impurities have been removed is also condensed and recovered for reuse in the resist washing/exfoliating step during manufacture of liquid crystal devices or IC, so that the soiled solvent need not be discarded or treated in a remote cite, thereby facilitating the process or the step using the solvent.

REFERENCES:
patent: 3073755 (1963-01-01), Banfield et al.
patent: 5348588 (1994-09-01), Winston
patent: 5456898 (1995-10-01), Shimokawa et al.

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