Method of and apparatus for processing vacuum pressure informati

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73 4V, 73 37, 340626, 414737, 901 40, G01L 900, G01M 302

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054756197

ABSTRACT:
A method and an apparatus for electrically processing vacuum pressure information in a vacuum unit. The apparatus basically comprises a vacuum supply mechanism, a detecting device, a determining device, a failure precognition signal generating device and a pressure setting-up device. In the apparatus, pressure values are first detected, and a desired pressure value lower than the maximum pressure value of the detected pressure values is digitally displayed on a display unit. Then, the desired pressure value is stored in a storage unit, and pressure values relative to vacuum, which are detected from the detecting device held in front of a passage which communicates with a vacuum port, are converted into digital signals. Thereafter, the digital signals thus converted are digitally displayed on the display unit. Further, the desired pressure value stored in the storage unit is compared with each of the detected pressure values. When they coincide with each other within a predetermined range, a predetermined signal is generated.

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patent: 4815313 (1989-03-01), Beard
patent: 5060174 (1991-10-01), Gross
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MKS INSTRUMENTS, Bulletin 250B, 2 pages, Jul. 1982, "Single Gas Controller for Pressure or Flow Control".

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