Method of and apparatus for preparing oxide superconducting film

Details Method of and apparatus for preparing oxide superconducting film Method of and apparatus for preparing oxide superconducting film

1992-09-25

1994-08-02

Bueker, Richard

Coating apparatus

Gas or vapor deposition

Crucible or evaporator structure

118715, 505732, 505474, 505950, C23C 1400

Patent

active

053342526

ABSTRACT:
In order to enable formation of a smooth and dense oxide superconducting film with no clear appearance of grain boundaries in a fine structure even at a high film forming rate, a laser ablation method is employed to apply a laser beam 2 to a target 1 containing components of an oxide superconductive material and deposit particles, which are thus scattered from the target 1, on a substrate 3, while gaseous oxygen is supplied from a gaseous oxygen inlet 7 toward laser plasma 6, which is generated by the application of the laser beam 2.

REFERENCES:
Webster's New Collegiate Dictionary, G&C Merriam Co, .COPYRGT.1975, pp. 1235 and 1304.
Roas, Epitaxial Growth of YBa.sub.2 Cu.sub.3 O.sub.7-x Thin Films by a Laser Evaporation Process, Appl. Phys. Lett. 53(16), Oct. 17, 1988, pp. 1557-1559.
Greer, In-Situ Growth of YBa.sub.2 Cu.sub.3 O.sub.7-x Thin Films on Three-Inch Wafers Using Laser-Ablation and an Atomic Oxygen Source, Proceedings of the 3rd Annual Conference on Superconductivity and Applications, Buffalo, N.Y., Sep. 1989.
Muenchausen, Effects of Beam Parameters on Eximer Laser Deposition of YBa.sub.2 Cu.sub.3 O.sub.7-x, Appl. Phys Lett. 56(6), Feb. 1990, pp. 578-580.

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