Method of and apparatus for optically measuring displacement

Details Method of and apparatus for optically measuring displacement Method of and apparatus for optically measuring displacement

1986-10-16

1988-03-01

Wan, Gene

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356 45, G01B 1102, G01C 306

Patent

active

047281944

ABSTRACT:
A light beam is projected on a reference plane and an object to-be-measured, a phase difference between reflected lights from them is changed by a phase shifter, a drive voltage for causing the change of the phase difference is applied to the phase shifter, a magnitude of phase shift of the phase of the reflected lights is detected by a phase shift detector on the basis of the drive voltage at a point of time at which the change of the phase difference of the reflected lights has been compensated, and an up pulse or down pulse is generated by an up-down pulse generator upon detecting a discontinuous change in the magnitude of phase shift attributed to the displacement of the object to-be-measured, while a pulse is generated by another pulse generator upon sensing a change in brightness of an interference signal of the reflected lights attributed to the displacement of the object to-be-measured. Besides, a mode selecting circuit supplies the output of the up-down pulse generator to a counter when a displacement speed of the object to-be-measured is lower than a reference speed, whereas it supplies the output of the other pulse generator to the counter when the displacement speed is higher than the reference speed. The displacement of the object to-be-measured is measured by utilizing an output of the counter.

REFERENCES:
patent: 4298283 (1981-11-01), Makosch et al.
patent: 4666296 (1987-05-01), Bailly-Salins

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