Method of and apparatus for measuring the shape of a wavefront

Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer

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382 43, G01B 902

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active

047446595

ABSTRACT:
Two light beams capable of interference with each other are applied to an area sensor while they are inclined to each other. The area sensor reads a pattern of interference fringes formed by the two light beams. The read interference fringe pattern is subjected to a Fourier transform, and then an inclination-related component is removed therefrom. Thereafter, an inverse Fourier transform is effected. The shape of the wavefront of light to be measured is determined on the basis of a phase difference between the two light beams which is known from the result of the inverse Fourier transform.

REFERENCES:
patent: 3923400 (1975-12-01), Hardy
patent: 4513441 (1985-04-01), Henshaw
patent: 4523846 (1985-06-01), Breckinridge et al.
"Interferometric Examination of Lenses, Mirrors, and Optical Systems", Forman, SPIE, vol. 163, 4-1979, pp. 103-111.

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