Method of and apparatus for measuring film thickness

Details Method of and apparatus for measuring film thickness Method of and apparatus for measuring film thickness

1991-02-06

1992-06-09

Fields, Carolyn E.

Radiant energy

Invisible radiant energy responsive electric signalling

Ultraviolet light responsive means

250341, 356381, 356357, G01N 2155, G01B 1106

Patent

active

051209667

ABSTRACT:
Light in the ultraviolet region is applied toward a transparent thin film of an object sample to measure energy of light reflected by the object sample. On the basis of the measured energy value, the thickness of the transparent thin film on the object sample can thus be correctly measured even if the film thickness is not more than 10 nm. In the preferred embodiment, an optical system is included to enable monitoring of a position of the thin transparent film. In one aspect of the invention visible light reflected from the transparent film is used to form an image to facilitate such monitoring.

REFERENCES:
patent: 2929257 (1960-02-01), Friedman
patent: 3565531 (1971-02-01), Kane et al.
patent: 4555767 (1985-11-01), Case et al.
patent: 4623254 (1986-11-01), Imose
patent: 4859064 (1989-08-01), Messerschmidt et al.
patent: 4899055 (1990-02-01), Adams
patent: 4984894 (1991-01-01), Kondo

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