Method of and apparatus for measuring energy gap of semiconducto

Details Method of and apparatus for measuring energy gap of semiconducto Method of and apparatus for measuring energy gap of semiconducto

1992-12-15

1995-04-11

Cosimano, Edward R.

Boots, shoes, and leggings

356372, 356432, 364481, 382 1, 382 8, G01N 2162

Patent

active

054065054

ABSTRACT:
A method and apparatus is disclosed for measuring an energy gap of a semiconductor material. The method contains the steps of analyzing a character of a reference semiconductor sample and setting an energy gap pixel value, estimating a transfer function between the pixel value, positioning the sample properly and imaging the spectrum to obtain a live image, storing the live image and scanning the respective pixel values along an x-axis of the image, sequentially comparing the respective pixel value and the energy gap pixel value, reading an x-coordinate of the pixel and converting the wavelength of the pixel to estimate the energy gap. The apparatus optically measures the energy gap and comprises a light source irradiating a light beam, a lens for focusing the light beam, a polychromator for irradiating the spectrum of light of the light beam to the sample, optical filters for evaluating a spectrum band of the polychromator into wavelength values, an image acquisition apparatus, an image signal processor, an energy gap detecting and displaying apparatus, and a computer for executing operation and control functions necessary to measure the energy gap by use of the image signal processor and the energy gap detecting and displaying apparatus.

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