Method of and apparatus for layer thickness measurement

Details Method of and apparatus for layer thickness measurement Method of and apparatus for layer thickness measurement

1985-02-08

1987-09-22

Eisenzopf, Reinhard J.

Electricity: measuring and testing

Magnetic

With means to create magnetic field to test material

118712, 324202, 324225, 427 10, G01B 710

Patent

active

046957979

ABSTRACT:
A method of and apparatus for measuring the layer of coating thickness of non-magnetic substances on a ferromagnetic parent material by the magneto-inductive method or of non-metallic substances on a conductive parent material by the eddy current method. This is done with the use of a probe whose coil inductance is evaluated as a criterion for the thickness of the layer to be measured. An adjustment to the geometry and the magnetic properties of the specimen are made before the first measurement. In the adjustment, at least one non-magnetic or non-conductive foil is disposed or are consecutively disposed between the probe and the surface of the coated specimen and the measured data obtained then and in the subsequent measurements are fed to a microcomputer. In the semiconductor store of the micro-computer, the non-linear relationship between the coil inductance of at least one probe and the distance between the probe and the parent material is being or has been stored in the form of at least one values table and in which the layer thickness values of the foils are being or have been stored. The microcomputer calculates the thickness values of the layer material from the measurement data fed to it and from the stored data.

REFERENCES:
patent: 3249860 (1966-05-01), Huggins
patent: 3757208 (1973-09-01), Brunner
patent: 3808525 (1974-04-01), Ott
patent: 4255709 (1981-03-01), Zatsepin et al.
Feinwerktechnik & Messtechnik 89, 1981, No. 6, p. 279.

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