Method of and apparatus for inspecting end of object for defect

Details Method of and apparatus for inspecting end of object for defect Method of and apparatus for inspecting end of object for defect

1992-01-15

1993-09-28

Rosenberger, Richard A.

Optics: measuring and testing

By polarized light examination

With light attenuation

356237, 356240, 356394, 250223B, 358101, 358106, 209526, G01B 1114, G01N 2100

Patent

active

052490343

ABSTRACT:
A method of and an apparatus for inspecting an end of an object for a defect by which not only a defect caused by deformation of an end of an object in a horizontal direction but also another defect caused by deformation in a vertical direction can be detected with a high degree of accuracy. Light from an end portion of an object is received by a pair of one- or two-dimensional image sensors and disposed at a predetermined angle relative to each other, and brightness outputs of individual picture elements of the image sensors are stored into memories. From the stored signals, a bright line produced by light from an edge of the object end portion is detected for each image sensor, and a position of the bright line is calculated as a digital amount from a number of picture elements for each image sensor. Then, the digital amounts are added and substracted between the image sensors. A defect is judged from results of the addition and subtraction.

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