Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Patent
1988-02-16
1989-07-04
Lacey, David L.
Adhesive bonding and miscellaneous chemical manufacture
Differential fluid etching apparatus
With microwave gas energizing means
156626, 156627, 156643, 20419213, 20419234, 20419233, 204298, 427 38, 427 39, B44C 122
Patent
active
048447676
ABSTRACT:
A plasma which is formed by the contact between a microwave and a reaction gas is brought into contact with an article to be etched which is AC-biased, thereby effecting etching of an exposed region of the article. The etching is carried out in a state wherein the self-bias formed between the plasma and the article is minimized, whereby it is possible to effect etching which provides high selectivity and which enables a substantially vertical side wall to be formed.
REFERENCES:
patent: 4282267 (1981-08-01), Kuyel
patent: 4298419 (1981-11-01), Suzuki et al.
patent: 4609426 (1986-09-01), Ogawa et al.
patent: 4622094 (1986-11-01), Otsubo
patent: 4705595 (1987-11-01), Okudaira et al.
Ninomiya Ken
Nishimatsi Shigeru
Okudaira Sadayuki
Suzuki Keizo
Dang Thi
Hitachi , Ltd.
Lacey David L.
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