Drying and gas or vapor contact with solids – Apparatus – With means to treat gas or vapor
Patent
1990-08-17
1992-07-28
Bennet, Henry A.
Drying and gas or vapor contact with solids
Apparatus
With means to treat gas or vapor
34 92, F26B 504
Patent
active
051331365
ABSTRACT:
Method of and apparatus for drying articles (18), in particular articles which are used in electronics and require clean-room conditions for their manufacture. Drying according to the method of the invention uses a partial vacuum in a vacuum storage and at least one air blast across the article by opening the vacuum storage. The wetness on the article is blown off at high velocity. The air blast can be repeated until there is only a residual moisture left on the article. This moisture can be removed by evaporation in a partial vacuum. The drying apparatus comprises a process chamber (14) for the articles. The process chamber has air inlet openings (34) distributed over its transverse sectional area and at least one air outlet opening (26) positioned opposite the inlet openings. The apparatus also comprises a partial vacuum storage tank (16, 30) which is connected to the interior of the chamber via the outlet opening and a poppet-valve (28) which closes the entire outlet opening and is actuated to instantaneously open the entire outlet opening. The method and the apparatus allow a fast drying of articles under clean-room conditions. The apparatus is readily integratable into a clean-bench and the method allows automation of the drying operation. For drying the invention requires less energy and no chemicals harmful to the environment.
REFERENCES:
patent: 3233334 (1966-02-01), Hamilton
patent: 3955286 (1976-05-01), Anrep
patent: 4592847 (1986-06-01), Schumacher
Baumeister, Standard Handbook for Mechanical Engineers, 1951, pp. 11-103 and 11-104.
Bennet Henry A.
International Business Machines - Corporation
Millett Douglas R.
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