Optics: measuring and testing – By polarized light examination – With birefringent element
Patent
1994-09-19
1995-05-23
Turner, Samuel A.
Optics: measuring and testing
By polarized light examination
With birefringent element
356357, G01B 902
Patent
active
054186129
ABSTRACT:
A method of determining surface contour of diffusely reflecting objects is realized by interferometric comparison of beams reflected from a reference mirror and from an object (11), by changing the optical path length of the object beam, by focusing the object beam onto a plane corresponding to the zero path length difference between the beams being compared interferometrically, and by measuring said variation of the optical path length from an initial value up to a moment when appears an interference pattern displaying maximum contrast. An apparatus intended to realize the method comprises an objective and, mounted in succession, a coherent radiation source, an interferometer including a beam-splitter, a reference mirror mounted in front of one face of the surface of the beam-splitter on the beam path perpendicular to it, and an optical path modulator mounted in front of the other face of the surface of beam-splitter with a possibility to produce oscillating movements along the beam path and fitted with a device measuring the displacements of said modulator. Besides that, the apparatus contains a photodetector, a device for sensing contrast of the interference bands, and a device detecting position of the modulator. The modulator posesses a corner reflector whose axis of symmetry is parallel to the beam path and exterior to the plane of the beam splitter. The objective is made with a possibility to integrate optically the coherent radiation source with a plane corresponding to the zero path length difference of the interferometer.
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Renishaw plc
Turner Samuel A.
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