Chemistry of inorganic compounds – Modifying or removing component of normally gaseous mixture
Patent
1984-04-27
1985-11-26
Doll, John
Chemistry of inorganic compounds
Modifying or removing component of normally gaseous mixture
423336, 423337, B01J 1200, B01D 4700, C01B 3304
Patent
active
045553890
ABSTRACT:
A method of burning exhaust gases containing gaseous silane in which the exhaust gases containing gaseous silane to be introduced into a combustion chamber are diluted with an inert gas so that the concentration of silane gas is reduced to less than 30% by volume and the diluted exhaust gases are fed from a nozzle to the combustion chamber and burnt through reaction with air in the combustion chamber while the region between the head of the nozzle top end and the base portion of the burning flame is shielded with an inert gas atmosphere.
An inert gas mixing pipe is connected for dilution to an exhaust gas feed section, an enclosure pipe is fitted to the outer circumference of an exhaust gas introduction pipe introduced into the combustion chamber to constitute a double pipe structure, and the enclosure pipe is connected at the rear end thereof to an inert gas feed pipe and slightly protuded at the top end thereof ahead of the top end for the exhaust gas introduction pipe.
REFERENCES:
patent: 3086851 (1963-04-01), Wagner
patent: 3954945 (1976-05-01), Lange et al.
Soneta Eietsu
Urata Tetsukazu
Alway Robert
Doll John
Toyo Sanso Co. Ltd.
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