Pumps – Electrical or getter type
Patent
1976-11-01
1979-09-11
Freeh, William L.
Pumps
Electrical or getter type
361120, F04B 3700, H01J 1714, H01J 6126
Patent
active
041673700
ABSTRACT:
A method of and apparatus for self-sustaining high vacuum in a high voltage environment. The method and apparatus employ ion pumping; the apparatus can be an integral part of high voltage equipment and acts to maintain a high vacuum condition in such equipment.
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Ames Elizabeth E.
Graneau Peter
Silevitch Michael B.
Freeh William L.
Massachusetts Institute of Technology
Shaw Robert
Smith, Jr. Arthur A.
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