Method of an apparatus for forming film on substrate by sensing

Details Method of an apparatus for forming film on substrate by sensing Method of an apparatus for forming film on substrate by sensing

1996-04-17

1998-06-16

Bareford, Katherine A.

Coating processes

Measuring, testing, or indicating

427 9, 427 10, 427240, 118663, 118712, 118 52, B05D 312, B05C 1102

Patent

active

057666717

ABSTRACT:
A cup with a top opening is disposed in an open-air space, and an atmospheric pressure sensor is disposed externally to the cup. A CPU calculates a control value which compensates for a variation in the thickness of a coating film which is formed on a surface of a substrate, based on an atmospheric pressure value which is measured by the atmospheric pressure sensor. An air-conditioner is controlled in accordance with the control value, whereby the temperature and the humidity of clean air which is supplied around the cup are adjusted and the variation in the thickness of the coating film is prevented without laborious work.

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