Method of alignment with the use of diffraction gratings and an

Details Method of alignment with the use of diffraction gratings and an Method of alignment with the use of diffraction gratings and an

1990-03-12

1991-03-19

Turner, Samuel

Optics: measuring and testing

By polarized light examination

With birefringent element

356349, 356400, G01B 902

Patent

active

050005731

ABSTRACT:
In a method of measuring/adjusting a relative displacement of objects using diffraction gratings, two monochromatic beams each having slightly different frequencies are synthesized to cause optical heterodyne interference so as to generate two beat signals. One of the beat signals is used as a reference signal. The other is used as a first interference beat signal generated by emitting the two monochromatic beams on a first diffraction grating arranged on a first object and by synthesizing two diffracted beams generated from the first diffraction grating by the above emission to cause optical heterodyne interference. A phase difference between the reference beat signal and the interference beat signal is then detected. Finally, the relative displacement is measured/adjusted in accordance with the phase difference.

REFERENCES:
patent: 4710026 (1987-12-01), Magome et al.
J. Vac. Sci. Technol., 19(4), Nov./Dec. 1981, pp. 1214-1218.
Precision Engineering, Jul. 1983, vol. 5, No. 3, pp. 111-114.

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