Method of alignment for efficient defect review

Details Method of alignment for efficient defect review Method of alignment for efficient defect review

2011-08-09

2011-08-09

Chang, Jon (Department: 2624)

Image analysis

Applications

Manufacturing or product inspection

C382S294000, C382S149000

Reexamination Certificate

active

07995833

ABSTRACT:
An inspection system includes a SEM visual inspection apparatus for detecting a defect in a semiconductor sample in steps of manufacturing a semiconductor device and a review apparatus for observing, at a high resolution, the defect in the semiconductor sample detected by the SEM visual inspection apparatus. The system has a function of transmitting an alignment dictionary image as one of alignment parameters to be set by the SEM visual inspection apparatus using an inspection recipe to the review apparatus.

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