Method of aligning a substrate, mask to be aligned with the...

Details Method of aligning a substrate, mask to be aligned with the... Method of aligning a substrate, mask to be aligned with the...

2007-05-22

2010-11-16

Chowdhury, Tarifur (Department: 2886)

Optics: measuring and testing

By alignment in lateral direction

C356S400000, C356S401000, C382S151000, C348S095000

Reexamination Certificate

active

07835001

ABSTRACT:
A method of aligning a substrate includes forming a first alignment hole in the substrate, preparing a mask with a second alignment hole narrower than the first alignment hole, modifying a surface reflectance around either the first alignment hole or the second alignment hole to form a treatment region, positioning the mask below the substrate, such that the first and second alignment holes overlap, and operating a sensor unit above the first alignment hole to examine alignment of the first and second alignment holes.

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