Radiant energy – Photocells; circuits and apparatus – Photocell controls its own optical systems
Reexamination Certificate
2006-05-09
2006-05-09
Le, Que T. (Department: 2878)
Radiant energy
Photocells; circuits and apparatus
Photocell controls its own optical systems
C250S559300
Reexamination Certificate
active
07041996
ABSTRACT:
While the alignment beam is focused on a mark on the substrate table, the substrate table is moved substantially perpendicularly to the alignment beam. If the image of the mark moves relative to a reference mark, then the substrate and the alignment beam are not perpendicular. The mark on the substrate table is aligned to a plurality of reference marks. At least two substrate marks are then aligned with a single reference mark. Errors due to the inclination of the alignment beam are eliminated from the expansion and rotation values calculated for the substrate.
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A copy of European Search Report dated Jul. 25, 2003.
English language translated Japanese Office Action dated Sep. 16, 2005.
Best Keith Frank
Consolini Joseph
Friz Alexander
Van Buel Henricus Wilhelmus Maria
ASML Netherlands B.V.
Le Que T.
Pillsbury Winthrop Shaw & Pittman LLP
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