Method of adjusting sample position in light wave interference a

Details Method of adjusting sample position in light wave interference a Method of adjusting sample position in light wave interference a

1996-12-05

1998-03-31

Font, Frank G.

Optics: measuring and testing

By polarized light examination

With birefringent element

356360, G01B 902

Patent

active

057344710

ABSTRACT:
When positioning a sample, a sample position adjusting light source section with a long coherence length is inserted into an optical system, and the sample position is adjusted such that the interference fringe pattern observed becomes a predetermined pattern, whereby the position of a surface to be inspected can be easily set within a coherence range in a simple configuration in a light wave interference apparatus using light with a short coherence length. When a sample position adjusting light source section (31) is inserted into the optical system, a light beam with a long coherence length, which has been turned into divergent light, is irradiated on each of a reference surface (4a) and a surface to be inspected (5a), whereby spherical waves reach these two surfaces (4a, 5a). These two divergent light beams are respectively reflected by the reference surface (4a) and the surface to be inspected (5a) so as to become a reference light component and an inspection light component, which are then recombined together by a light-splitting surface (3a) of a beam splitter (3) while interfering with each other, thereby forming an interference fringe on a CCD (8). This interference fringe comprises a pattern of concentric circles. The sample (5) is moved by a minute distance in the optical-axis direction (B) so as to reduce the number of fringes, and then is stopped at the time when the circular interference fringe pattern disappears.

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