Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
1996-01-03
2001-07-31
Pendegrass, Joan (Department: 2852)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S052000, C355S077000
Reexamination Certificate
active
06268903
ABSTRACT:
BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates to a projection optical apparatus for projecting and exposing the pattern of a first object on a second object and, more particularly, to a method of adjusting the projection optical apparatus.
2. Related Background Art
A projection optical system used in an exposure apparatus that prints a precision circuit pattern on a substrate (wafer, plate, or the like) coated with a photosensitive material requires very high optical performance. For this purpose, optical members used in the projection optical system are manufactured with an ultimately high manufacturing precision.
When manufactured optical members are combined to assemble a projection optical system, very fine adjustment is performed such as adjusting the distances between the respective optical members by changing the thicknesses of washers between lens barrels holding the respective optical members, tilting the optical members (rotating the optical members about, as an axis, a direction perpendicular to the optical axis), or shifting the optical members (moving the optical members in a direction perpendicular to the optical axis), while actually measuring the aberration of the projection optical system. This adjustment minimizes degradation in optical performance which is caused by the manufacturing error of the optical members or which occurs during assembly of the optical members.
SUMMARY OF THE INVENTION
According to the present invention, there is provided an adjusting method having the first step of measuring the residual distortion component of a projection optical system having a predetermined target member in its optical path, the second step of calculating, based on the measurement result of the first step, the surface shape of the target member which cancels the residual distortion component, the third step of removing the target member from the projection optical system and machining the target member so as to have the surface shape calculated in the second step, and the fourth step of inserting the target member machined in the third step into the optical path of the projection optical system.
The present invention will be more fully understood from the detailed description given hereinbelow and the accompanying drawings, which are given by way of illustration only and are not to be considered as limiting the present invention.
Further scope of applicability of the present invention will become apparent from the detailed description given hereinafter. However, it should be understood that the detailed description and specific examples, while indicating preferred embodiments of the invention, are given by way of illustration only, since various changes and modifications within the spirit and scope of the invention will be apparent to those skilled in the art from this detailed description.
REFERENCES:
patent: 3583790 (1971-06-01), Baker
patent: 4259004 (1981-03-01), Tateoka et al.
patent: 4730900 (1988-03-01), Uehara et al.
patent: 4801808 (1989-01-01), Hamasaki
patent: 4883345 (1989-11-01), Anzai et al.
patent: 4888614 (1989-12-01), Suzuki et al.
patent: 4943733 (1990-07-01), Mori et al.
patent: 4965630 (1990-10-01), Kato et al.
patent: 4977426 (1990-12-01), Hirose
patent: 5095386 (1992-03-01), Scheibengraber
patent: 5105075 (1992-04-01), Ohta et al.
patent: 5117255 (1992-05-01), Shiraishi et al.
patent: 5136413 (1992-08-01), MacDonald et al.
patent: 5260832 (1993-11-01), Togino et al.
patent: 5308991 (1994-05-01), Kaplan
patent: 5309198 (1994-05-01), Nakagawa
patent: 5350924 (1994-09-01), Stengl et al.
patent: 5367406 (1994-11-01), Suzuki et al.
patent: 5392119 (1995-02-01), McArthur et al.
patent: 5432587 (1995-07-01), Nozue
patent: 5459577 (1995-10-01), Ototake et al.
patent: 5581324 (1996-12-01), Miyai et al.
patent: 5677757 (1997-10-01), Taniguchi et al.
patent: 5995263 (1999-11-01), Tokuda et al.
patent: 0 307 726 (1989-03-01), None
patent: 0 660 169 (1995-06-01), None
patent: 2 138 163 (1984-10-01), None
patent: 59-144127 (1984-08-01), None
patent: 61-254915 (1986-11-01), None
patent: 62-35620 (1987-02-01), None
patent: 62-35619 (1987-02-01), None
patent: 63-6553 (1988-01-01), None
patent: 63-185024 (1988-07-01), None
patent: 63-232320 (1988-09-01), None
patent: 4-355419 (1992-12-01), None
patent: 5-173065 (1993-07-01), None
patent: 5-251303 (1993-09-01), None
patent: 6-5490 (1994-01-01), None
patent: 6-349702 (1994-12-01), None
English-language translation of JP-A-63-6553.
Chiba Hiroshi
Yoshikawa Toshikazu
Nikon Corporation
Oliff & Berridg,e PLC
Pendegrass Joan
LandOfFree
Method of adjusting projection optical apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method of adjusting projection optical apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of adjusting projection optical apparatus will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2555070