Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate
2006-05-23
2006-05-23
Nguyen, Kiet T. (Department: 2881)
Photocopying
Projection printing and copying cameras
With temperature or foreign particle control
C355S053000, C355S055000, C355S067000, C250S442110
Reexamination Certificate
active
07050147
ABSTRACT:
A lithographic projection apparatus is disclosed. The apparatus includes a beam production system configured to provide a beam of radiation, pattern the beam, and project the patterned beam onto a target portion of a substrate, and a support table for supporting an article so that a planar surface of the article lies in a predetermined plane transverse to a propagation direction of the projection beam. The support table has a support surface and an array of protrusions disposed on the support surface that are constructed and arranged to support the article. A position selective material surface melting device is configured to act on individual protrusions when the support table is operable in the apparatus, such that localized areas of an upper surface of the protrusion are melted and subsequently allowed to cool, thereby causing the localized areas to be raised with respect to the upper surface of the protrusion.
REFERENCES:
patent: 6392738 (2002-05-01), van de Pasch et al.
patent: 2005/0061995 (2005-03-01), Vink et al.
patent: 2003-188068 (2003-04-01), None
ASML Netherlands B.V.
Nguyen Kiet T.
Pillsbury Winthrop Shaw & Pittman LLP
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