Abrading – Abrading process – With tool treating or forming
Reexamination Certificate
2007-10-09
2007-10-09
Nguyen, Dung Van (Department: 3723)
Abrading
Abrading process
With tool treating or forming
C451S028000, C451S458000
Reexamination Certificate
active
11514180
ABSTRACT:
The method of adhering polishing pads is capable of easily adhering the polishing pads without damages. The method comprises the steps of: tentatively adhering the polishing pads to polishing plates; attaching a roller unit having a shaft and a roller member, which is capable of rotating about the shaft and which has a projected section having a prescribed width and spirally formed in an outer circumferential face, on the lower polishing plate in the radial direction; moving the upper polishing plate downward, by the holding unit, until the upper polishing plate contacts the roller member; and simultaneously adhering the polishing pads onto the upper and lower polishing plate by rotating the upper and polishing plates in the opposite directions at the same speed with pressing the roller member by the upper polishing plate.
REFERENCES:
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patent: 3840102 (1974-10-01), Dawson
patent: 4674236 (1987-06-01), Kawakami et al.
patent: 6254461 (2001-07-01), Benning et al.
patent: 7090572 (2006-08-01), Ito
patent: 59-53151 (1984-03-01), None
patent: 9-239657 (1997-09-01), None
Koyama Harumichi
Nakamura Yoshio
Fujikoshi Machinery Corp.
Nguyen Dung Van
LandOfFree
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