Method of adhering polishing pads and jig for adhering the same

Details Method of adhering polishing pads and jig for adhering the same Method of adhering polishing pads and jig for adhering the same

2007-12-11

2007-12-11

Rose, Robert A. (Department: 3723)

Abrading

Abrading process

With tool treating or forming

C451S458000

Reexamination Certificate

active

11580889

ABSTRACT:
The method of adhering polishing pads is capable of easily exchanging polishing pads in a comfortable posture. The method comprises the steps of: setting a pad adhering carrier, which has a through-hole in which a roller unit for pressing polishing pads is fixed, in a holder with arranging a roller unit in a radial direction of a lower polishing plate and an upper polishing plate; relatively moving the upper polishing plate toward the lower polishing plate so as to clamp the roller unit between the lower polishing plate and the upper polishing plate with a prescribed force; rotating the lower polishing plate and the upper polishing plate, which clamp the roller unit, in the opposite directions at the same speed; and pressing the polishing pads onto polishing faces of the lower polishing plate and the upper polishing plate by the roller unit.

REFERENCES:
patent: 7125326 (2006-10-01), Walsh et al.
patent: 2007/0054606 (2007-03-01), Nakamura et al.
patent: 2000-42912 (2000-02-01), None

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