Method of adding on chip capacitors to an integrated circuit

Details Method of adding on chip capacitors to an integrated circuit Method of adding on chip capacitors to an integrated circuit

1996-07-11

1998-08-04

Nguyen, Tuan H.

Semiconductor device manufacturing: process

Making passive device

438393, 438239, 438240, 438250, 148DIG14, H01L 2120

Patent

active

057893039

ABSTRACT:
A capacitor structure and method of forming a capacitor structure for an integrated circuit is provided. The capacitor structure, comprising a bottom electrode, capacitor dielectric and top electrode, is formed on a passivation layer overlying the interconnect metallization. The capacitor electrodes are interconnected to the underlying integrated circuit from underneath, through conductive vias, to the underlying interconnect metallization. The method provides for adding capacitors to an otherwise completed and passivated integrated circuit. The structure is particularly applicable for ferroelectric capacitors. The passivation layer acts as a barrier layer for a ferroelectric dielectric. Large area on-chip capacitors may added without affecting the interconnect routing or packing density of the underlying devices, and may be added almost independently of the process technology used formation of the underlying integrated circuit.

REFERENCES:
patent: 5352622 (1994-10-01), Chung
patent: 5366920 (1994-11-01), Yamamichi et al.
patent: 5407855 (1995-04-01), Maniar et al.
patent: 5489548 (1996-02-01), Nishioka et al.
patent: 5504041 (1996-04-01), Summerfelt
patent: 5536672 (1996-07-01), Miller et al.
patent: 5566045 (1996-10-01), Summerfelt et al.

Affiliated with

Also associated with

Rating

Method of adding on chip capacitors to an integrated circuit does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of adding on chip capacitors to an integrated circuit, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of adding on chip capacitors to an integrated circuit will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1176634