Data processing: generic control systems or specific application – Generic control system – apparatus or process – Optimization or adaptive control
Reexamination Certificate
2007-02-20
2007-02-20
Barnes, Crystal J. (Department: 2121)
Data processing: generic control systems or specific application
Generic control system, apparatus or process
Optimization or adaptive control
C700S060000, C700S063000, C700S065000, C700S121000, C706S021000, C706S022000, C706S023000, C318S607000, C318S638000, C318S687000
Reexamination Certificate
active
10857450
ABSTRACT:
By applying time-frequency analysis to a given standard iterative learning control or ILC an adaptive filter for the learned feed-forward loop is designed. This time varying filter varies according to the momentary frequency content of the error signal and allows to discriminate between areas of deterministic and stochastic error. Its application results in selective application of ILC to those intervals where error signals of high level are concentrated and allows application of a single ILC acquisition to different setpoint trajectories. The adaptive filter finds particular use in lithographic scanning systems where it is used for varying scan length.
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European Search Report in reference to EP 03 07 7461.
Ellenbroek Rogier
Rotariu Andreea Iuliana
Steinbuch Maarten
Van Baars Gregor Edward
ASML Netherlands B.V.
Barnes Crystal J.
Pillsbury Winthrop Shaw & Pittman LLP
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