Method of adapting a two-stage refrigerator cryopump to a specif

Details Method of adapting a two-stage refrigerator cryopump to a specif Method of adapting a two-stage refrigerator cryopump to a specif

1989-04-14

1990-09-04

Capossela, Ronald C.

Refrigeration

Low pressure cold trap process and apparatus

55269, 417901, B01D 800

Patent

active

049533592

ABSTRACT:
The invention relates to a method of adapting a twostage refrigerator cryopump to a specific gas; the cryopump includes a first cooling stage to which pump surfaces are fastened and which is equipped with a heating device; the cryopump further includes a second cooling stage to which pump surfaces are fastened and which, during operation, takes on a temperature of up to 20 K. In order to enable the pump to perform at an optimum level for gases having different vapor pressures, it is proposed to control the heating device in such a manner that the coldest location of the first cooling head or, more precisely, of its pump surfaces, has a temperature which is higher by 5 to 10 K than the vapor pressure temperature of the respective gas associated with the maximum process pressure.

REFERENCES:
patent: 4438632 (1984-03-01), Lessard et al.
patent: 4614093 (1986-09-01), Bachler et al.
patent: 4667477 (1987-05-01), Matsuda et al.
patent: 4679401 (1987-07-01), Lessard et al.
patent: 4757689 (1988-07-01), Bachler et al.

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