Metal fusion bonding – Process – Using high frequency vibratory energy
Patent
1991-11-20
1993-03-09
Ramsey, Kenneth J.
Metal fusion bonding
Process
Using high frequency vibratory energy
228110, 228179, H01L 21607
Patent
active
051920158
ABSTRACT:
A first piece (22) is bonded to a second piece (24) at a selected location (45) by positioning the first piece (22) and second piece (24) between a pair of bonding tools (36 and 38), with the bonding tools at the selected location (45) of the first piece (22) and the second piece (24) where bonding is to be achieved. The selected location (45) of the first piece (22) and the second piece (24) is pressed between the pair of bonding tools (36 and 38) with an applied force (46), the applied force (46) increasing from zero to a prebonding force (64), being maintained at the prebonding force (64) for a prebonding period (66), changing to a bonding force (60), and thereafter decreasing from the bonding force (60) to zero. Ultrasonic energy (48) is applied to the selected location (45) through at least one of the bonding tools (36 and 38), the ultrasonc energy (48) increasing to a prebonding energy (68) during the period that the applied force (46) is being increased from zero to the bonding force (60), being maintained at the prebonding energy (68) during at least a portion of the prebonding force period (66), changing to a bonding energy (72) prior to the time that the applied force (46) reaches the bonding force (60), and thereafter decreasing to zero.
REFERENCES:
patent: 3610506 (1971-10-01), Robinson
patent: 3822465 (1974-07-01), Frankort et al.
patent: 4496095 (1985-01-01), Renshaw et al.
Ingle Lloyd D.
Koontz John D.
Denson-Low W. K.
Ramsey Kenneth J.
Santa Barbara Research Center
Schubert W. C.
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