Optics: measuring and testing – Plural test
Reexamination Certificate
2006-01-11
2008-08-12
Chowdhury, Tarifur (Department: 2886)
Optics: measuring and testing
Plural test
C356S243100, C356S369000, C356S448000, C356S630000, C702S104000
Reexamination Certificate
active
07411665
ABSTRACT:
An optical measurement system having a spectrophotometer and a ellipsometer is calibrated, the spectrophotometer and the ellipsometer first being calibrated independently of one another. A spectrophotometer layer thickness (dphoto) of a specimen is then determined at an initial angle of incidence (θinit) using the spectrophotometer. An ellipsometer layer thickness (delli) of the specimen is then determined using the layer thickness determined with the ellipsometer. The spectrophotometer and the ellipsometer are matched to one another by varying the initial angle of incidence (θinit) until the absolute value of the difference between the spectrophotometer layer thickness (dphoto) and the ellipsometer layer thickness (delli) is less than a predefined absolute value.
REFERENCES:
patent: 5771094 (1998-06-01), Carter et al.
patent: 6381009 (2002-04-01), McGahan
patent: 6504608 (2003-01-01), Hallmeyer et al.
patent: 6567213 (2003-05-01), Rosencwaig et al.
patent: 7253887 (2007-08-01), Wolf et al.
patent: 2004/0239933 (2004-12-01), Opsal et al.
Chowdhury Tarifur
Leica Microsystems CMS GmbH
Pajoohi Tara S
Simpson & Simpson PLLC
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