Method for washing substrates

Details Method for washing substrates Method for washing substrates

1997-11-21

1998-10-06

Warden, Jill

Cleaning and liquid contact with solids

Processes

Work handled in bulk or groups

134 15, 134 26, 134 66, 134 32, 134 82, 134902, 414222, B08B 1300

Patent

active

058171851

ABSTRACT:
A method of washing substrates arranged at a substantially equal pitch internal in a cassette which includes steps of (a) transferring the substrates to a holder a pitch interval narrower than the arrangement pitch interval in said cassette; (b) supplying a washing solution into a processing bath; (c) conveying the holder holding the substrates into the processing bath; (d) dipping the substrates in the washing solution in the processing bath to wash the substrates; and (e) supplying a rinse solution into the processing bath to substitute the washing solution with the rinse solution to rinse the substrates in the processing bath.

REFERENCES:
patent: 5236515 (1993-08-01), Ueno et al.
patent: 5261431 (1993-11-01), Ueno et al.
patent: 5261776 (1993-11-01), Burck et al.
patent: 5327921 (1994-07-01), Mokuo et al.
patent: 5445171 (1995-08-01), Ohuori et al.
patent: 5503171 (1996-04-01), Yokomizo et al.
patent: 5520744 (1996-05-01), Fujikawa et al.
patent: 5575079 (1996-11-01), Yokomizo et al.
patent: 5730162 (1998-03-01), Shindo et al.

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