Cleaning and liquid contact with solids – Processes – For metallic – siliceous – or calcareous basework – including...
Patent
1997-10-06
1999-12-07
Gulakowski, Randy
Cleaning and liquid contact with solids
Processes
For metallic, siliceous, or calcareous basework, including...
134 3, 134 26, 134 28, 134 30, 134 33, 134 41, 134 952, 134 953, 1341021, 134153, 134902, B08B 502
Patent
active
059976535
ABSTRACT:
A method for washing and drying a substrate includes the steps of (a) disposing a substrate on a spin chuck such that a surface to be treated faces upward, (b) applying a washing solution from a first nozzle to the surface of the substrate while rotating the substrate disposed on the spin chuck so as to cleanse the surface, and (c) blowing a gas from a second nozzle against the surface while rotating the substrate and moving the second nozzle above the substrate in a radial direction from a central portion toward a peripheral portion of the substrate, thereby drying the surface of the substrate.
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patent: 5558110 (1996-09-01), Williford, Jr.
Carrillo S.
Gulakowski Randy
Tokyo Electron Limited
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